The MicroE Mercury II™ MII5000 is an ultra-high-resolution incremental linear encoder designed for the most demanding precision motion applications. Delivering resolutions down to 1.2 nm, exceptional accuracy, and industry-leading low cyclical error, Mercury II enables smoother velocity control and superior positioning performance for advanced automation systems.
Engineered for applications including linear motors, precision stages, semiconductor equipment, and wire bonding machines, the Mercury II combines advanced optical sensing technology with an extremely compact design. Its low jitter performance improves servo stability, allowing motion systems to achieve faster settling times, higher throughput, and improved repeatability.
Featuring the industry’s smallest tape scale system at only 6 mm wide, Mercury II integrates index and limit functionality while minimizing installation space. The innovative design is less than half the width of many competing encoder systems, making it ideal for compact precision machines where every millimeter matters.
With industry-leading ±2° alignment tolerance, Mercury II dramatically simplifies installation. Sensors can be aligned and operational in seconds without complex adjustment procedures. Optional built-in or stick-on optical index and limit markers further streamline system setup.
Key Features
- Ultra-high resolution incremental linear encoder
- Resolution down to 1.2 nm
- High accuracy for precision positioning systems
- Industry-leading low cyclical error and low jitter
- Improves velocity control and servo performance
- Compact 6 mm wide tape scale system
- Integrated index and limit functionality
- Broad alignment tolerance of ±2°
- Fast installation and simplified commissioning
- Low power consumption for improved thermal stability
- Digital quadrature A/B output with index and limits
- Maximum speed up to 5 m/s
Applications
The Mercury II MII5000 is designed for high-performance motion systems, including:
- Semiconductor manufacturing equipment
- Wire bonding machines
- Linear motor stages
- Precision positioning stages
- Electronics manufacturing
- Optical inspection systems
- Medical equipment
- Metrology systems
- Robotics
- Laser processing equipment
- High-speed automation systems
Technical Highlights
| Specification | Value |
|---|---|
| Technology | Optical Incremental Linear Encoder |
| Model | MII5000 |
| Output Interface | Digital Quadrature A/B with Index and Limits |
| Resolution | 5 µm – 1.2 nm |
| Accuracy (Linear Glass Scale) | ±1 µm |
| Accuracy (Metal Tape Scale) | ±5 µm/m |
| Grating Pitch | 20 µm |
| Maximum Speed | 5 m/s |
| Sensor Dimensions | 38.5 × 13.5 × 11 mm |
| Operating Environment | Atmospheric |
| Alignment Tolerance | ±2° |
Linear Scale Compatibility
| Feature | MT Tape Scale | TSMII Glass Scale |
|---|---|---|
| Highest Accuracy Class | ±5 µm | ±3 µm |
| Measuring Length | Up to 30 m | Up to 995 mm |
| Width | 6 mm | 6 mm / 20 mm |
| Index Location | Center | Center |
| Material | Inconel 625 | Soda Lime Glass |
| Thermal Expansion | 13 ppm/°C | 8 ppm/°C |
| Mounting | Pressure Sensitive Adhesive | Epoxy |