The Mercury II™ 6000V digital output encoder is a high-vacuum rated solution engineered for applications requiring exceptional precision and reliability. Designed by MicroE, this compact encoder offers class-leading resolution, accuracy, and ease of integration. Built with vacuum-compatible materials and vented for use up to 10⁻⁸ Torr, the MII 6000V endures bake-out temperatures up to 150 °C for 48 hours.
Featuring broad alignment tolerances (±2°) and built-in optical index and limit markers, it allows for rapid, error-free installation in under 30 seconds. Its low cyclical error ensures smooth velocity control for linear motors, positioning stages, and precision bonders, while the compact 6 mm-wide scale optimizes system space.
With resolutions from 5 µm to 1.2 nm, the Mercury II 6000V delivers unmatched accuracy, stability, and efficiency for high-vacuum motion control systems.
General Specifications
| Specification | Value |
|---|---|
| Dimensions | 22.6 × 12.7 × 8.1 mm |
| Digital Interface | A quad B with index and limits |
| Interpolation | Up to ×16,384 in the connector |
| Resolution Range | 5 µm to 1.2 nm |
| Grating Pitch | 20 µm |
| Maximum Speed | 5 m/s |
| Operating Environment | Vacuum up to 10⁻⁸ Torr |
Grating Compatibility – MIIL
| Parameter | Value |
|---|---|
| Highest Accuracy Class | ±1 µm |
| Measuring Length | Up to 995 mm |
| Width Options | 6 mm / 20 mm |
| Index | Center |
| Material | Soda-lime glass |
| Coefficient of Thermal Expansion | 8 ppm/°C |
| Mounting Method | Epoxy |