High-Performance Optical Encoder for Ultra-High Vacuum Motion Systems
The Mercury™ M1500V is a compact optical incremental encoder engineered for high-precision positioning in ultra-high vacuum (UHV) environments. Designed for semiconductor manufacturing, scientific instrumentation, electron microscopy, and advanced research equipment, it combines exceptional accuracy with a miniature form factor and industry-leading vacuum compatibility.
Its integrated interpolation electronics simplify system design while delivering reliable digital position feedback without requiring external signal processing hardware. The vented sensor construction and vacuum-compatible materials allow operation in environments up to 10⁻⁸ Torr, making it ideal for demanding vacuum motion applications.
Key Features
- Designed for ultra-high vacuum applications up to 10⁻⁸ Torr
- Vacuum-compatible materials with 48-hour bake-out at 150°C
- Compact sensor measuring only 20.6 × 12.7 × 8.4 mm
- Integrated interpolation electronics
- Digital A Quad B output with Index
- Resolutions down to 0.5 μm (linear)
- Rotary resolutions up to 655,000 CPR
- Excellent alignment tolerance for fast installation
- Low power consumption minimizes thermal drift
- Compatible with both linear and rotary glass scales
Typical Applications
- Semiconductor manufacturing equipment
- Wafer inspection systems
- Electron microscopy
- Vacuum robotics
- Precision positioning stages
- Scientific research equipment
- Metrology systems
- Photonics manufacturing
- Cleanroom automation
Technical Specifications
| Feature | Specification |
|---|---|
| Encoder Technology | Optical Incremental |
| Output | Digital A Quad B with Index |
| Resolution (Linear) | 5 μm to 0.5 μm |
| Resolution (Rotary) | Up to 655,000 CPR |
| Maximum Rotary Speed | 13,000 rpm |
| Linear Speed | Up to 7.2 m/s |
| Vacuum Rating | 10⁻⁸ Torr |
| Bake-Out Rating | 150°C for 48 hours |
| Dimensions | 20.6 × 12.7 × 8.4 mm |
| Accuracy | Up to ±1 μm (linear), ±2 arc-sec (rotary) |