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Mercury™ Series – M1000V
The Mercury™ M1000V vacuum encoder provides high-precision position measurement in ultra-high vacuum environments up to 10⁻⁸ Torr. Compact and vented, it fits into tight spaces while delivering reliable performance. Built with vacuum-compatible materials and rated for a 48-hour bake-out at 150°C, it ensures thermal stability with low power consumption. Wide alignment tolerances simplify installation, and analog outputs can be interpolated in customer electronics to achieve resolutions up to 78 nm. Ideal for precision linear motion, high-speed positioning, and automated systems in scientific and industrial vacuum applications.
Specifications of Mercury™ Series – M1000V
| Specification | Value |
|---|---|
| Dimensions | 20.6 x 12.7 x 8.4 mm |
| Interpolation | Up to ×256 in customer electronics |
| Resolutions | 5 µm – 78 nm |
| Accuracy Class, Linear Glass | Up to ±1 µm |
| Grating Pitch | 20 µm |
| Max Speed | 7.2 m/s |
| Operating Environment | Vacuum up to 10⁻⁸ |
Grating Compatibility
| Parameter | Value |
|---|---|
| Grating Type | MIIL |
| Highest Accuracy Class | ±1 µm |
| Measuring Length | Up to 995 mm |
| Width | 6 mm / 20 mm |
| Index | Center |
| Material | Soda lime glass |
| Coefficient of Thermal Expansion | 8 ppm/°C |
| Mounting | Epoxy |
