Mercury™ Series – M1500V

Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10^-8 torr.

The M1500V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
Miniature sensor fits into tight spaces
Wide alignment tolerance make for easy installation and setup
Built-in interpolation produces digital outputs with up to 0.5μm resolution
Low power consumption aids in thermal stability of the system

Specifications of Mercury™ Series – M1500V

Dimensions	20.6 x 12.7 x 8.4 mm
Interface, Digital	A quad B with index
Interface, Analog	–
Interpolation	up to 40x in sensor
Resolutions	5 µm – 0.5 µm
Accuracy Class, Linear Glass	up to +/- 1 µm
Accuracy Class, Linear Metal Tape	–
Grating Pitch	20 µm
Max Speed	7.2 m/s
Operating Environment	Vacuum up to 10^-8

Grating Compatibility

	L
Highest Accuracy Class	+/- 1µm
Measuring Length	up to 2020
Width	20mm
Index	Center or end
Material	Soda lime glass
Coefficient of Thermal Expansion	8ppm/°C
Mounting	Epoxy