MercuryII™ Series – MII6000V

The Mercury II™ 6000V digital output encoder is a high-vacuum rated solution engineered for applications requiring exceptional precision and reliability. Designed by MicroE, this compact encoder offers class-leading resolution, accuracy, and ease of integration. Built with vacuum-compatible materials and vented for use up to 10⁻⁸ Torr, the MII 6000V endures bake-out temperatures up to 150 °C for 48 hours.

Featuring broad alignment tolerances (±2°) and built-in optical index and limit markers, it allows for rapid, error-free installation in under 30 seconds. Its low cyclical error ensures smooth velocity control for linear motors, positioning stages, and precision bonders, while the compact 6 mm-wide scale optimizes system space.

With resolutions from 5 µm to 1.2 nm, the Mercury II 6000V delivers unmatched accuracy, stability, and efficiency for high-vacuum motion control systems.

General Specifications

Specification	Value
Dimensions	22.6 × 12.7 × 8.1 mm
Digital Interface	A quad B with index and limits
Interpolation	Up to ×16,384 in the connector
Resolution Range	5 µm to 1.2 nm
Grating Pitch	20 µm
Maximum Speed	5 m/s
Operating Environment	Vacuum up to 10⁻⁸ Torr

Grating Compatibility – MIIL

Parameter	Value
Highest Accuracy Class	±1 µm
Measuring Length	Up to 995 mm
Width Options	6 mm / 20 mm
Index	Center
Material	Soda-lime glass
Coefficient of Thermal Expansion	8 ppm/°C
Mounting Method	Epoxy