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MercuryII™ Series – MII6000V

Mercury II™ digital output high-vacuum rated encoders offer class-leading resolution, accuracy, and small sensor size. With MicroE’s broad alignment tolerances, no other commercially available 10-8 Torr rated encoder is easier to align, easier to use, or easier to integrate into your designs.

Specifications of Mercury II™ Series – MII6000V

SPECIFICATION VALUE
Dimensions 22.6 x 12.7 x 8.1 mm
Interface, Digital A quad B with index and limits
Interface, Analog
Interpolation up to ×16,384 in the connector
Resolutions 5 µm – 1.2 nm
Accuracy Class, Linear Glass up to +/- 1 µm
Accuracy Class, Linear Metal Tape
Grating Pitch 20 µm
Max Speed 5 m/s
Operating Environment Vacuum up to 10^-8

Grating Compatibility

MIIL
Highest Accuracy Class +/- 1µm
Measuring Length up to 995mm
Width 6mm/20mm
Index Center
Material Soda lime glass
Coefficient of Thermal Expansion 8ppm/°C
Mounting Epoxy

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