Mercury™ M1500V vacuum encoders combine compact size, high performance, and reliability for demanding motion systems in vacuum environments. Designed with vented housings and vacuum-compatible materials rated to 10⁻⁸ Torr, the M1500V ensures stable, precise operation even after a 48-hour bake-out at 150 °C. With wide alignment tolerances for easy setup, built-in interpolation for resolutions down to 0.5 µm, and low power consumption for enhanced thermal stability, it’s ideal for semiconductor, research, and precision automation applications.
| Specification | Value |
|---|---|
| Dimensions | 20.6 × 12.7 × 8.4 mm |
| Interface (Digital) | A quad B with index |
| Interpolation | Up to ×40 in sensor |
| Resolutions | 5 µm – 0.5 µm |
| Accuracy Class (Linear Glass) | Up to ±1 µm |
| Grating Pitch | 20 µm |
| Max Speed | 7.2 m/s |
| Operating Environment | Vacuum up to 10⁻⁸ Torr |
Grating Compatibility
| Model | Highest Accuracy Class | Measuring Length | Width | Index | Material | CTE | Mounting |
|————|—————————–|———————–|————|————-|—————-|————–|
| L | ±1 µm | Up to 2020 mm | 20 mm | Center or End | Soda lime glass | 8 ppm/°C | Epoxy |
