Mercury™ Series – M1000V

Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10^-8 torr.

The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
Miniature sensor fits into tight spaces
Wide alignment tolerance make for easy installation and setup
Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm
Low power consumption aids in thermal stability of the system

Specifications of Mercury™ Series – M1000V

Dimensions	20.6 x 12.7 x 8.4 mm
Interface, Digital	–
Interface, Analog	1 Vpp sin/cos with index
Interpolation	up to ×256 in customer electronics
Resolutions	5 µm – 78 nm
Accuracy Class, Linear Glass	up to +/- 1 µm
Accuracy Class, Linear Metal Tape	–
Grating Pitch	20 µm
Max Speed	7.2 m/s
Operating Environment	Vacuum up to 10^-8

Grating Compatibility

	MIIL
Highest Accuracy Class	+/- 1µm
Measuring Length	up to 995mm
Width	6mm/20mm
Index	Center
Material	Soda lime glass
Coefficient of Thermal Expansion	8ppm/°C
Mounting	Epoxy