Mercury™ Series – M1000V

The Mercury™ M1000V vacuum encoder provides high-precision position measurement in ultra-high vacuum environments up to 10⁻⁸ Torr. Compact and vented, it fits into tight spaces while delivering reliable performance. Built with vacuum-compatible materials and rated for a 48-hour bake-out at 150°C, it ensures thermal stability with low power consumption. Wide alignment tolerances simplify installation, and analog outputs can be interpolated in customer electronics to achieve resolutions up to 78 nm. Ideal for precision linear motion, high-speed positioning, and automated systems in scientific and industrial vacuum applications.

Specifications of Mercury™ Series – M1000V

Specification	Value
Dimensions	20.6 x 12.7 x 8.4 mm
Interpolation	Up to ×256 in customer electronics
Resolutions	5 µm – 78 nm
Accuracy Class, Linear Glass	Up to ±1 µm
Grating Pitch	20 µm
Max Speed	7.2 m/s
Operating Environment	Vacuum up to 10⁻⁸

Grating Compatibility

Parameter	Value
Grating Type	MIIL
Highest Accuracy Class	±1 µm
Measuring Length	Up to 995 mm
Width	6 mm / 20 mm
Index	Center
Material	Soda lime glass
Coefficient of Thermal Expansion	8 ppm/°C
Mounting	Epoxy