Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.
- The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
- Miniature sensor fits into tight spaces
- Wide alignment tolerance make for easy installation and setup
- Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm
- Low power consumption aids in thermal stability of the system
Specifications of Mercury™ Series – M1000V
| Dimensions | 20.6 x 12.7 x 8.4 mm |
| Interface, Digital | – |
| Interface, Analog | 1 Vpp sin/cos with index |
| Interpolation | up to ×256 in customer electronics |
| Resolutions | 5 µm – 78 nm |
| Accuracy Class, Linear Glass | up to +/- 1 µm |
| Accuracy Class, Linear Metal Tape | – |
| Grating Pitch | 20 µm |
| Max Speed | 7.2 m/s |
| Operating Environment | Vacuum up to 10^-8 |
Grating Compatibility
| MIIL | |
| Highest Accuracy Class | +/- 1µm |
| Measuring Length | up to 995mm |
| Width | 6mm/20mm |
| Index | Center |
| Material | Soda lime glass |
| Coefficient of Thermal Expansion | 8ppm/°C |
| Mounting | Epoxy |